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Solution

Solution

Solution

Coating

Etch

Offering

  • High-quality re-coating
  • White (transparent) Yttrium compound coatings
  • Provides yttrium based coatings, which show superior corrosion resistance properties compared to ceramic(Al2O3) and quartz in the etch process
  • Provides customized coatings according to the semiconductor’s degree of integration

Benefit

  • Achieved faster seasoning time through coatings with a low contamination level
  • Extends the lifespan through re-coating of parts
  • Improves process yield with low particle properties

Application

  • LAM, TEL, AMAT, SEMES etc.

Applicable Technology

Technology Name Technology Full Name Technology Detail Brochure
APS Series Atmospheric Plasma Spray Series A ceramic coating technology by atmospheric plasma spraying
SAC™ Series Super Advanced Coating Series A ceramic coating technology by suspension plasma spraying
ZERON™ Series ZERON™ Series A vacuum ceramic coating technology by PVD and AD
CUBE™ Series Cube Coating A SiC coating technology on graphite