Out-Gassing / Metallic Ion Free
Out-Gassing / Metallic Ion Free
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Offering
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- Minimizes moisture with dry cleaning technology
- Moisture minimization technology with nitrogen purge packaging method
- Ion cleaning technology chelate
- Quantitative moisture evaluation through RGA
- Quantitative ion analysis through ChemTrace ICP-MS, and IC
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Benefit
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- Ultra Clean Part’s
- Reduces the level of contamination and facility operation time
- Control change of process through excellent metallic ion management
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Application
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- LAM, TEL, AMAT, ULVAC, SEMES etc.
| Technology Name |
Technology Full Name |
Technology Detail |
Brochure |
| PBC™ |
Pulse Beam Clean |
Deposition removal technology using pulse beam |
|
| NPP™ |
Nitrogen Purge Package |
Packaging technology using nitrogen purge |
|
| TIC™ |
Tornado Ion Clean |
Metallic positive ion removal technology using chelate |
|
| MPS™ |
Micro Powder Spray |
Pellet Size CO2 cleaning technology |
|
| PSC™ |
Pure Surface Clean |
Snow Size CO2 cleaning technology |
|
