(주)싸이노스

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Solution

Solution

CVD

CVD

Offering

Provides nano-size surface modification and coating for shower head type parts
Provides the customized coating thickness in the process with atomic layer unit coating
Provides very high-density coating layer by the arrangement of atoms and surface modification

Benefit

Minimizes the changes in gas flow by nano-size coating and surface modification
Minimizes the changes in size by the deposition and etching inside the hole through process gas and reactivity coating
Save process cost by improving the lifetime of the shower head

Application

AMAT, LAM, ASME, TEL Wonik IPS, ASME

Applicable Technology

Technology Name	Technology Full Name	Technology Detail	Brochure
ALD™	Atomic Layer Deposition	Ceramic coating technology by atomic layer manufacturing method
AlF™	Aluminium Fluoride Coating	A modification technology for substrate surface using plasma implantation