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Solution

Solution

CVD

Offering

  • Provides nano-size surface modification and coating for shower head type parts
  • Provides the customized coating thickness in the process with atomic layer unit coating
  • Provides very high-density coating layer by the arrangement of atoms and surface modification

Benefit

  • Minimizes the changes in gas flow by nano-size coating and surface modification
  • Minimizes the changes in size by the deposition and etching inside the hole through process gas and reactivity coating
  • Save process cost by improving the lifetime of the shower head

Application

  • AMAT, LAM, ASME, TEL Wonik IPS, ASME

Applicable Technology

Technology Name Technology Full Name Technology Detail Brochure
ALD™ Atomic Layer Deposition Ceramic coating technology by atomic layer manufacturing method
AlF™ Aluminium Fluoride Coating A modification technology for substrate surface using plasma implantation