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Solution

Solution

Solution

Coating

PVD

Offering

  • Provides the customized metal coatings based on the processing environment
  • Provides Ultra High Density / Hardness Metal Coating
  • High adhesiveness characteristic
  • Maximizing coating surface area with shape-controlling coating techniques

Benefit

  • Reduction in the out-gassing issue reduces chamber PM backup time
  • Extending part life-time
  • Improves process retention with low particle properties
  • Prolongs lifetime by minimizing the damages in parts

Application

  • AMAT, ULVAC, CANON, etc.

Applicable Technology

Technology Name Technology Full Name Technology Detail Brochure
Al ARC® Coating Al ARC® Coating ARC spraying metal coating technology using AI wire
Hemi® Series Coating Hemi® Series Coating Maximizing roughness through ARC Spraying metal coating technology using Al wire
Stealth™ Series Coating Stealth™ Series Coating ARC spraying high hardness metal coating technology using Al wire+α
MAHA™ Coating MAHA™ Coating A metal coating technology using laser 3D printing technology